| Developers: | Zelenograd Nanotechnology Center (ZNTC) |
| Date of the premiere of the system: | April 2025 |
| Branches: | Electrical and Microelectronics |
Content |
History
2026: The price of the lithograph is disclosed - 392 million rubles
In February 2026, it became known that the base price of the domestic 350-nm lithograph Progress STP-350, which includes delivery, installation and training of personnel, is about 392 million rubles without VAT. With an extended guarantee, the price of the system exceeds 500 million rubles.
According to the publication CNews, such equipment is produced by the Zelenograd Nanotechnology Center (ZNTC). The production and delivery period is 18 months from the date of receipt of an advance payment in the amount of 50% of the cost. The performance of the lithograph reaches 63 silicon plates with a diameter of 150 mm or 43 plates with a diameter of 200 mm per hour.
In Russia,The purchase of an extended two-year guarantee will cost 58 million rubles, and an additional five-year one - another 111 million rubles. Warranty service includes repair, remote diagnostics and comprehensive system support. Option modules are also available: active vibration protection for 40 million rubles and a set of 24 photographic patterns - stencils for applying a scheme to a plate - for 12 million rubles.
The representative of ZNTC said that the company has already concluded contracts for the delayed supply of equipment. In his statement, he stressed that the price of the lithograph is formed by the cost of materials and components and is competitive against the background of foreign analogues.
The independent expert Aleksei Boyko noted that the price of domestic development is tens of percent lower than that of foreign systems of a comparable level. Other industry experts interviewed by CNews agreed with this point of view.
At the same time, the head of Trinity Technologies, Alexander Tymoshenko, pointed out that from the point of view of the global market economy, the declared price is extremely high for these technical characteristics. However, the expert added, in the context of restrictive measures and the need for technological independence, such a cost may be justified.[1]
2025: Product Announcement
At the end of April 2025, the Zelenograd Nanotechnology Center (ZNTC) announced the completion of development work on the creation of the first domestic photolithograph with a resolution of 350 nanometers, which is a key element in the production of microcircuits. The installation of combination and projection exposure has already been adopted by the state commission, which included representatives of industry organizations and the largest Russian manufacturers of microelectronics.
According to the press service of the ZNTC, the Belarusian company Planar, which has a specialized scientific and technical reserve throughout the post-Soviet space, was involved as a co-executor of the project. Joint development has a number of significant advantages over previous models.
Anatoly Kovalev, General Director of ZNTC JSC, noted that the area of the working field was significantly increased in the new installation - 22×22 mm versus 3,2×3,2 mm in the previous version. The maximum diameter of the processed plates has also been increased to 200 mm instead of the previous 150 mm. A particularly important technological breakthrough is the use of a solid-state laser in the Russian installation instead of the traditional mercury lamp used in the world practice of producing lithographs. The solid-state laser has more power, energy efficiency, high durability and a narrower spectrum.
Technological processes are already being adapted to the peculiarities of the production of the end consumer, as well as the conclusion of contracts for the supply of the first plants for the modernization of existing and equipping new microelectronic production facilities in the country.
All tests of the developed equipment and further adaptation of technological processes to the peculiarities of the customer's production will be carried out at the specialized site of the engineering and research center of ZNTC JSC - the Testing ground for technological equipment. This approach allows you to solve debugging problems without affecting the technological processes and resources of existing production facilities, which significantly reduces the path from equipment development to serial production of microelectronic products.[2]

