| Developers: | National Center for Physics and Mathematics (NCPM) |
| Branches: | Pharmaceuticals, Medicine, Healthcare |
2023: Mishustin instructed to develop an X-ray lithograph for the production of chips
Following a trip to Sarov, Russian Prime Minister Mikhail Mishustin instructed the Ministry of Industry and Trade and the Ministry of Economic Development to work out Rosatom's proposals for several scientific projects, including the creation of a domestic X-ray lithograph and production technologies for its use. The press service of the Government of the Russian Federation announced this on July 8, 2023. The order must be completed by August 30, 2023.
The head of the Cabinet visited Sarov on a working trip on June 2, 2023. There he got acquainted with the flagship projects of the National Center for Physics and Mathematics (NCPM), and also visited the laser complex of the Institute for Laser and Physical Research.
The creation of an X-ray lithograph for the production of modern chips in February 2023 was announced by the scientific director of the Russian Federal Nuclear Center - the All-Russian Research Institute of Experimental Physics (Rosatom) Vyacheslav Solovyov.
 | The program is developing, supplemented taking into account the results that we receive. One of the new projects is the creation of a lithograph. It will also be created within the framework of the National Center for Physics and Mathematicia.Yu And in cooperation with our nuclear center, with Rosatom, with the Nizhny Novgorod Institute of Microstructure Physics, we will implement this project, Solovyov said. |  |
The project for the creation of X-ray lithographs in the Russian Federation, allowing the production of chips with a nanometer topological size, was proposed in 2022 by the scientific director of the NCPM, academician Alexander Sergeyev. In AMSL devices, the laser evaporates tin, the X-ray radiation of the resulting plasma is used for photolithography. An alternative Russian project will use X-ray mirrors developed in Russian institutes to focus radiation. According to the academician, in two years a lithographic system with a power that is several times higher than what AMSL does can be obtained.[1]
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