The first Russian lithograph with a resolution of 350 nm for the production of chips has been released
| Customers: Ledger element Moscow; Electrical and Microelectronics Contractors: Zelenograd Nanotechnology Center (ZNTC) Project date: 2025/09
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Zelenograd Nanotechnology Center has completed the production of the first domestic lithograph with a resolution of 350 nanometers, designed for the manufacture of semiconductor chips at Russian microelectronic enterprises. The equipment is supplied to the company "Industry Solutions," which is part of the contour of the "Element" group and specializes in the production of power electronics for the power, engineering and aviation industries. The start of deliveries of the first Russian lithographic equipment became known on September 24, 2025.
According to CNews, the installation is designed for projection transfer of a photomask image to a semiconductor plate in the production of ultra-large integrated circuits with topological norms of 350 nm. These technological standards are used to manufacture the element base of power and automotive electronics, as well as industrial control systems.
The development of the lithograph was carried out in partnership with the Belarusian company Planar as part of the tenders of the Ministry of Industry and Trade won by the ZNTC in 2021. Design work on the creation of equipment was completed in the spring of 2025. Russian experts have begun to develop the next generation of lithographs with an improved resolution of 130 nanometers.
The technical characteristics of the installation are the working field with an area of 22 by 22 millimeters and the ability to process semiconductor plates with a diameter of 200 millimeters. The working wavelength of the lithograph is 365 nanometers with a guaranteed service life of at least five years. The weight of the equipment reaches 3.5 tons.
The equipment was created to ensure the technological independence of the Russian microelectronic industry and is designed to modernize existing production lines, as well as equip new microelectronic factories. The developers do not disclose the cost of the lithographic installation for commercial reasons.[1]
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