Roselectronics: High-purity gas production technology

2022: Creation of high-purity gas production technology

Holding "Roselectronics State Corporation" Rostec has developed technologies for the production, storage and transportation of high-purity, gases used in the manufacture of modern. microelectronic products Own production of high-purity gases will allow, replace imported materials used in the production of domestic electronic components, and create high-tech products in demand for. microelectronics market This was announced on December 28, 2022 by TAdviser representatives of Rostec.

According to them, many special gases required for the microelectronic industry of the level of purity in Russia until this moment were not produced. Part of Roselectronics NPP Salyut has developed technologies for the industrial production of monosilane, arsine, phosphine, ammonia, boron trifluoride, boron trichloride.

Russia has created a technology for producing high-purity gases for the production of chips
Photo: Rostec

"High-purity gases play an important role in the creation of microelectronics. In the production process, up to several dozen different gases can be used - both quite ordinary, such as oxygen, nitrogen, carbon dioxide, hydrogen, argon, and quite rare or toxic - fluorine, nitrogen trifluoride or boron. For example, arsine and phosphine serve to change the conductivity of the material, allowing the electrical properties of semiconductors to be controlled. Monosilane is widely used in the manufacture of substrates and process layers of microcircuits. The new technologies of Roselectronics are designed to replace foreign materials that were used in the production of microelectronic products, "explained Oleg Yevtushenko, executive director of Rostec.

According to Rostec, the Salyut NPP has created technologies for producing mixtures of gases with a certain ratio in composition and content of the main impurities supplied in high-pressure cylinders, and arsine, phosphine, boron trifluoride supplied in low-pressure cylinders.

To solve the problem of maintaining the degree of purity of the obtained materials during their transportation and storage at the enterprise, it was proposed to use special preparation of cylinders before filling with high-purity gases. This solution allows you to maintain the required purity of materials in low-pressure cylinders for at least 6 months, and in high-pressure cylinders for at least 12 months.

"Process gases are used at every stage in the manufacture of semiconductor devices. Our company can meet the needs of the Russian market in high-purity gases, and if necessary, we are ready to increase production volumes. In addition, our specialists continue to improve the technologies for obtaining, storing and transporting high-purity gases, and are also developing new solutions for obtaining materials for microelectronics, "said Alexander Bushuev, General Director of NPP Salyut.