Rosatom and RAS: Photolithograph for the production of microelectronics

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• Electronics industry (Russian market)
• Microelectronics (Global Market)

2023: Photolithograph development plan for microelectronics production

Rosatom and the Russian Academy of Sciences will develop a powerful photolithograph for the production of microelectronics. This was told by the scientific director of the National Center for Physics and Mathematics (NCPM, Sarov, Nizhny Novgorod Region), Academician of the Russian Academy of Sciences Alexander Sergeyev in an interview with the Expert magazine. According to him, several of the largest institutions of Rosatom and academic institutions are planning to participate in the project. This became known on January 30, 2023.

Photolithography is a method of obtaining a certain pattern on the surface of a material, used in microelectronics and other types of microtechnologies, as well as in the production of printed circuit boards. One of the main techniques of planar technology used in the production of semiconductor devices.

As Alexander Sergeyev said, in Russia there are all the components necessary for the creation of a lithograph based on laser-plasma interaction.

First, a powerful laser. Rosatom has multicilowatt lasers that are used in various applications. Secondly, the technology of making X-ray mirrors, for example, at the Institute of Microstructure Physics of the Russian Academy of Sciences, we have one of the best in the world. We can also use Rosatom's developments to model this entire system based on a digital twin, the scientist listed.

Sergeev also recalled that the world's first development of an X-ray lithograph was carried out by several national laboratories of the US Sergeyev of Energy, an analogue of Rosatom. And Russian institutions also participated in this program. Russia today needs a similar cooperation of strong institutions, the scientist^[1] of^[2].

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